I can't believe I left these two off my initial post.
Foo Fighters, Allstate Arena, 07 I think. Dave Grohl made this a memorable event almost by himself. I'm sure I've never seen a performer have as much fun on stage. The whole band was extremely tight and energetic, but he is at a different level.
Tool in 06 or 07. Ridiculous musicianship - on a level with Rush in the hard rock genre. Extremely loud but still sounded great, and the video screens they use on stage with custom visuals made the show an experience that melded sound and vision perfectly.
Another HM would be every time I've seen Flogging Molly, especially a St. Patrick's Day show at the Aragon Ballroom. They have almost as much fun onstage as Dave Grohl.